| pentamethyl-Silanamine |
| N,N-Dimethylaminotrimethylsilane |
| pentamethyl-silanamin |
| n,n-dimethyltrimethylsilylamine |
| Dimethyl-trimethylsilanyl-amine |
| Silanamine,pentamethyl- |
| (Dimethylamino)trimethylsilane |
| Dimethylaminotrimethylsilane |
| N-(Trimethylsilyl)dimethylamine |
| TMS-DMA |
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